Cavity glass / Cap glass

Cavity glass / Cap glass

Outline

Hi-precision cavities can be formed inside of the glass wafer. With transparent and thinner finish on the cavity bottom, it can work as a window which transmits laser light or LED light without distortion, or through which observation is possible by an oil immersion microscope.

Features

・Transparent finish on the cavity bottom


	Enlarged view	Enlarged view

・Standard cavity type


	Enlarged view	Enlarged view

Applications

CMOS image sensor cap
Analytical well plate
LD / LED cap

Standard specifications
Material	Glass
Glass size	≦φ200mm
Min. thickness	0.15mm
Thickness tolerance	±0.01mm
Min. cavity size	φ0.1mm/□0.07mm
Cavity shape	制約なし
Cavity size tolerance	±0.02mm
Chipping	≦10μm
Cavity cross-section shape	Straight / Taper / Step
Metallization process	Possible on - Top and bottom surfaces - Sidewalls

Note: These are standard specifications.
In case you have any request other than these, please feel free to contact us.

End user market / Applications

Projector

・Display devices for projectors,etc

AV/Mobile

・RF-switches/relays for mobile devices such as smartphones, portable video games, digital cameras, car navigation systems,

Pressure sensors, Gyroscopes, Acceleration sensors, image sensors
・Display devices for mobile devices such as smartphones, portable video games, digital cameras
・Display devices for pico-projectors

Semiconductor

・RF-MEMS switches.
・Image sensors,etc

Automotive

・Pressure sensors, Acceleration sensors.
・Gyroscopes.
・LED,etc